Search for "electron lithography" in Full Text gives 3 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2024, 15, 447–456, doi:10.3762/bjnano.15.40
Beilstein J. Nanotechnol. 2024, 15, 26–36, doi:10.3762/bjnano.15.3
Beilstein J. Nanotechnol. 2015, 6, 492–498, doi:10.3762/bjnano.6.50